Development of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation

TitleDevelopment of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation
Publication TypeConference Paper
Year of Publication2002
AuthorsAimez V, Beauvais J, Beerens J, Morris D
Conference NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS