Intermixing of InAs/GaAs quantum dots by proton implantation and rapid thermal annealing

TitleIntermixing of InAs/GaAs quantum dots by proton implantation and rapid thermal annealing
Publication TypeJournal Article
Year of Publication2009
AuthorsIlahi B, Zaâboub Z, Salem B, Morris D, Aimez V, Sfaxi L, Maaref H
JournalMaterials Science in Semiconductor Processing
Volume12
Pagination71-74