Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates
| Title | Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates |
| Publication Type | Journal Article |
| Year of Publication | 1999 |
| Authors | Lavallée E, Beauvais J, Drouin D, Beerens J, Morris D, Chaker M |
| Journal | Electronics Letters |
| Volume | 35 |
| Pagination | 2027-2028 |
