Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates

TitleFabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates
Publication TypeJournal Article
Year of Publication1999
AuthorsLavallée E, Beauvais J, Drouin D, Beerens J, Morris D, Chaker M
JournalElectronics Letters
Volume35
Pagination2027-2028