Low energy ion implantation induced control of InP-based heterostructure properties

TitreLow energy ion implantation induced control of InP-based heterostructure properties
Type de publicationConference Paper
Nouvelles publications2001
AuteursAimez V, Beauvais J, Drouin D, Beerens J, Morris D, Jandl S
Nom du typeProceedings of SPIE - The International Society for Optical Engineering