Development of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation

TitreDevelopment of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation
Type de publicationConference Paper
Nouvelles publications2002
AuteursAimez V, Beauvais J, Beerens J, Morris D
Nom du typeConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS