Ion channeling effects on quantum well intermixing in phosphorus-implanted InGaAsP/InGaAs/InP
| Titre | Ion channeling effects on quantum well intermixing in phosphorus-implanted InGaAsP/InGaAs/InP |
| Type de publication | Journal Article |
| Nouvelles publications | 2005 |
| Auteurs | Barba D, Salem B, Morris D, Aimez V, Beauvais J, Chicoine M, Schiettekatte F |
| Journal | Journal of Applied Physics |
| Volume | 98 |
| Pagination | 1-5 |
