Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates
| Titre | Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates |
| Type de publication | Journal Article |
| Nouvelles publications | 1999 |
| Auteurs | Lavallée E, Beauvais J, Drouin D, Beerens J, Morris D, Chaker M |
| Journal | Electronics Letters |
| Volume | 35 |
| Pagination | 2027-2028 |
