Fabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates

TitreFabrication of silicide structures by silicide direct-write electron-beam lithography process (SiDWEL) on thin silicon nitride membranes and on tantalum substrates
Type de publicationJournal Article
Nouvelles publications1999
AuteursLavallée E, Beauvais J, Drouin D, Beerens J, Morris D, Chaker M
JournalElectronics Letters
Volume35
Pagination2027-2028