Low energy ion implantation induced control of InP-based heterostructure properties

TitleLow energy ion implantation induced control of InP-based heterostructure properties
Publication TypeConference Paper
Year of Publication2001
AuthorsAimez, V, Beauvais, J, Drouin, D, Beerens, J, Morris, D, Jandl, S
Conference NameProceedings of SPIE - The International Society for Optical Engineering
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