Development of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation

TitleDevelopment of a spatially selective, high resolution quantum well intermixing (HRQWI) method based on low energy ion implantation
Publication TypeConference Paper
Year of Publication2002
AuthorsAimez, V, Beauvais, J, Beerens, J, Morris, D
Conference NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
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