Intermixing of InAs/GaAs quantum dots by proton implantation and rapid thermal annealing

TitleIntermixing of InAs/GaAs quantum dots by proton implantation and rapid thermal annealing
Publication TypeJournal Article
Year of Publication2009
AuthorsIlahi, B, Zaâboub, Z, Salem, B, Morris, D, Aimez, V, Sfaxi, L, Maaref, H
JournalMaterials Science in Semiconductor Processing
Volume12
Pagination71-74
Full Text
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